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Technology Transfer

Office of Industrial Consultancy and Sponsored Research(IC&SR)

Lanthanum Doping of Ceria Abrasive to Obtain Robust CMP Polish Rates
Intellectual Property
  • IITM IDF Ref 1086
  • IN 426681 Patent Granted
Technology Readiness Level
  • TRL 3
  • Experiment Proof of Concept
Granted Patent Certificate
Research Lab
  • Prof. RAMANATHAN S
Department of Chemical Engineering

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